Hochschulschrift
Plasma-assisted atomic layer deposition for microelectronics applications
- Location
-
Deutsche Nationalbibliothek Frankfurt am Main
- Extent
-
Online-Ressource
- Language
-
Englisch
- Notes
-
Magdeburg, Universität, Dissertation, 2016
- Classification
-
Physik
- Event
-
Veröffentlichung
- (where)
-
Magdeburg
- (who)
-
Universitätsbibliothek
- (when)
-
2016
- Creator
-
Amusan, Akinwumi Abimbola
- Contributor
-
Burte, Edmund P.
Edelmann, Frank T.
- URN
-
urn:nbn:de:gbv:ma9:1-8379
- Rights
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Last update
-
25.03.2025, 1:45 PM CET
Data provider
This object is provided by:
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Object type
- Hochschulschrift
Associated
- Amusan, Akinwumi Abimbola
- Burte, Edmund P.
- Edelmann, Frank T.
- Universitätsbibliothek
Time of origin
- 2016
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Atomic Layer Deposition and Microanalysis of Ultrathin Layers
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