Structural Properties Characterized by the Film Thickness and Annealing Temperature for La2O3 Films Grown by Atomic Layer Deposition
- Location
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Deutsche Nationalbibliothek Frankfurt am Main
- ISSN
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1556-276X
- Extent
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Online-Ressource
- Language
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Englisch
- Notes
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online resource.
- Bibliographic citation
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Structural Properties Characterized by the Film Thickness and Annealing Temperature for La2O3 Films Grown by Atomic Layer Deposition ; volume:12 ; number:1 ; day:29 ; month:3 ; year:2017 ; pages:1-7 ; date:12.2017
Nanoscale research letters ; 12, Heft 1 (29.3.2017), 1-7, 12.2017
- Classification
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Physik
- Creator
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Wang, Xing
- Contributor
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Liu, Hongxia
Zhao, Lu
Fei, Chenxi
Feng, Xingyao
Chen, Shupeng
Wang, Yongte
SpringerLink (Online service)
- DOI
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10.1186/s11671-017-2018-8
- URN
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urn:nbn:de:1111-2017041614273
- Rights
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Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Last update
-
15.08.2025, 7:24 AM CEST
Data provider
This object is provided by:
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Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Associated
- Wang, Xing
- Liu, Hongxia
- Zhao, Lu
- Fei, Chenxi
- Feng, Xingyao
- Chen, Shupeng
- Wang, Yongte
- SpringerLink (Online service)
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All‐Optical Spin–Orbit Coupling of Light in Coherent Media Using Rotating Image
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Effects of Rapid Thermal Annealing and Different Oxidants on the Properties of LaxAlyO Nanolaminate Films Deposited by Atomic Layer Deposition
Electromagnetically induced polarization grating
Impacts of Annealing Conditions on the Flat Band Voltage of Alternate La2O3/Al2O3 Multilayer Stack Structures
Analog/RF Performance of T-Shape Gate Dual-Source Tunnel Field-Effect Transistor
On-line monitoring of steel ball stamping by mechatronics cold heading equipment based on PVDF polymer sensing material
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Impacts of Cu-Doping on the Performance of La-Based RRAM Devices
All‐Optical Spin–Orbit Coupling of Light in Coherent Media Using Rotating Image
The Study of Electrical Properties for Multilayer La2O3/Al2O3 Dielectric Stacks and LaAlO3 Dielectric Film Deposited by ALD
Effects of Rapid Thermal Annealing and Different Oxidants on the Properties of LaxAlyO Nanolaminate Films Deposited by Atomic Layer Deposition
Electromagnetically induced polarization grating
Impacts of Annealing Conditions on the Flat Band Voltage of Alternate La2O3/Al2O3 Multilayer Stack Structures
Analog/RF Performance of T-Shape Gate Dual-Source Tunnel Field-Effect Transistor
On-line monitoring of steel ball stamping by mechatronics cold heading equipment based on PVDF polymer sensing material
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