The Study of Electrical Properties for Multilayer La2O3/Al2O3 Dielectric Stacks and LaAlO3 Dielectric Film Deposited by ALD
- Standort
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Deutsche Nationalbibliothek Frankfurt am Main
- ISSN
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1556-276X
- Umfang
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Online-Ressource
- Sprache
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Englisch
- Anmerkungen
-
online resource.
- Erschienen in
-
The Study of Electrical Properties for Multilayer La2O3/Al2O3 Dielectric Stacks and LaAlO3 Dielectric Film Deposited by ALD ; volume:12 ; number:1 ; day:29 ; month:3 ; year:2017 ; pages:1-4 ; date:12.2017
Nanoscale research letters ; 12, Heft 1 (29.3.2017), 1-4, 12.2017
- Klassifikation
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Physik
- Urheber
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Feng, Xing-Yao
- Beteiligte Personen und Organisationen
-
Liu, Hong-Xia
Wang, Xing
Zhao, Lu
Fei, Chen-Xi
Liu, He-Lei
SpringerLink (Online service)
- DOI
-
10.1186/s11671-017-2004-1
- URN
-
urn:nbn:de:1111-2017041613878
- Rechteinformation
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Letzte Aktualisierung
-
15.08.2025, 07:31 MESZ
Datenpartner
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Beteiligte
- Feng, Xing-Yao
- Liu, Hong-Xia
- Wang, Xing
- Zhao, Lu
- Fei, Chen-Xi
- Liu, He-Lei
- SpringerLink (Online service)
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