Hochschulschrift
Application of time-of-flight secondary ion mass spectrometry (TOF-SIMS) for high performance depth profiling of semiconductor materials
- Location
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Deutsche Nationalbibliothek Frankfurt am Main
- Dimensions
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21 cm
- Extent
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82 S.
- Language
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Englisch
- Notes
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Ill., graph. Darst.
Münster (Westfalen), Univ., Diss., 1997 (Nicht für den Austausch)
- Keyword
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Siliciumhalbleiter
Dotierung
Tiefenprofilmessung
Sekundärionen-Massenspektrometrie
Flugzeitmassenspektrometrie
- Creator
- Table of contents
- Rights
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Bei diesem Objekt liegt nur das Inhaltsverzeichnis digital vor. Der Zugriff darauf ist unbeschränkt möglich.
- Last update
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11.03.2025, 11:42 AM CET
Data provider
This object is provided by:
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Object type
- Hochschulschrift
Associated
Other Objects (12)
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TOF-SIMS-Analysen interplanetarer Staubteilchen
Time-of-flight and depth imaging : sensors, algorithms, and applications
Status and perspectives of the neutron time-of-flight facility n_TOF at CERN
Hochauflösende Sekundärionen-Massenspektrometrie (TOF-SIMS) an Halbleiterstrukturen
Real Time Imaging of Deuterium in a Duplex Stainless Steel Microstructure by Time-of-Flight SIMS
The measurement programme at the neutron time-of-flight facility n_TOF at CERN
Abbildende TOF-SIMS und Laser-SNMS nanostrukturierter Oberflächen
Abbildende TOF-SIMS und Laser-SNMS nanostrukturierter Oberflächen
Scalable, Time-of-Flight and Depth-of-Interaction Detector Units for High-Resolution PET Systems
Application of molecular primary ions for time-of-flight secondary ion mass spectrometry (TOF-SIMS) of organic surfaces
TOF-SIMS in Cosmochemistry
TOF-SIMS-Analysen interplanetarer Staubteilchen
TOF-SIMS-Analysen interplanetarer Staubteilchen
Time-of-flight and depth imaging : sensors, algorithms, and applications
Status and perspectives of the neutron time-of-flight facility n_TOF at CERN
Hochauflösende Sekundärionen-Massenspektrometrie (TOF-SIMS) an Halbleiterstrukturen
Real Time Imaging of Deuterium in a Duplex Stainless Steel Microstructure by Time-of-Flight SIMS
The measurement programme at the neutron time-of-flight facility n_TOF at CERN
Abbildende TOF-SIMS und Laser-SNMS nanostrukturierter Oberflächen
Abbildende TOF-SIMS und Laser-SNMS nanostrukturierter Oberflächen
Scalable, Time-of-Flight and Depth-of-Interaction Detector Units for High-Resolution PET Systems
Application of molecular primary ions for time-of-flight secondary ion mass spectrometry (TOF-SIMS) of organic surfaces
TOF-SIMS in Cosmochemistry
TOF-SIMS-Analysen interplanetarer Staubteilchen
TOF-SIMS-Analysen interplanetarer Staubteilchen
Time-of-flight and depth imaging : sensors, algorithms, and applications
Status and perspectives of the neutron time-of-flight facility n_TOF at CERN
Hochauflösende Sekundärionen-Massenspektrometrie (TOF-SIMS) an Halbleiterstrukturen
Real Time Imaging of Deuterium in a Duplex Stainless Steel Microstructure by Time-of-Flight SIMS
The measurement programme at the neutron time-of-flight facility n_TOF at CERN
Abbildende TOF-SIMS und Laser-SNMS nanostrukturierter Oberflächen
Abbildende TOF-SIMS und Laser-SNMS nanostrukturierter Oberflächen