Hochschulschrift
Doping by nitrogen implantation and characterization of heteroepitaxial 3C-SiC thin films on Si and SOI substrates
- Location
-
Deutsche Nationalbibliothek Frankfurt am Main
- ISBN
-
9783895742927
3895742929
- Dimensions
-
21 cm
- Extent
-
XII, 108 S.
- Edition
-
1. Aufl.
- Language
-
Englisch
- Notes
-
Ill., graph. Darst.
Zugl.: Berlin, Techn. Univ., Diss., 1998
- Bibliographic citation
-
Wissenschaftliche Schriftenreihe Elektrotechnik ; Bd. 26
- Keyword
-
Silicium
Kristallfläche
Siliciumcarbid
Heteroepitaxie
Ionenimplantation
Stickstoff
Wafer
SOI-Technik
- Event
-
Veröffentlichung
- (where)
-
Berlin
- (who)
-
Köster
- (when)
-
1998
- Creator
-
Reichert, Walter
- Table of contents
- Rights
-
Bei diesem Objekt liegt nur das Inhaltsverzeichnis digital vor. Der Zugriff darauf ist unbeschränkt möglich.
- Last update
-
11.06.2025, 2:02 PM CEST
Data provider
This object is provided by:
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Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Object type
- Hochschulschrift
Associated
- Reichert, Walter
- Köster
Time of origin
- 1998
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