Detailed study of electromigration induced damage in Al and AlCuSi interconnects
- Location
-
Deutsche Nationalbibliothek Frankfurt am Main
- Extent
-
Online-Ressource
- Language
-
Englisch
- Notes
-
In: Materials reliability in microelectronics IV : symposium held April 5 - 8, 1994, San Francisco, California, U.S.A. ... / Ed.: Peter Børgesen ... - Pittsburgh, Pa. : Materials Research Soc., 1994. - (Materials Research Society symposium proceedings ; 338), S. 373-378
- Classification
-
Ingenieurwissenschaften und Maschinenbau
- Keyword
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Oberflächenschaden ; Elektromigration ; Studie
- Event
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Veröffentlichung
- (where)
-
Saarbrücken
- (who)
-
Saarländische Universitäts- und Landesbibliothek
- (when)
-
2008
- Contributor
- URN
-
urn:nbn:de:bsz:291-scidok-17952
- Rights
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Last update
-
25.03.0440, 1:54 PM CET
Data provider
This object is provided by:
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Associated
- Möckl, U. E.
- Bauer, M.
- Kraft, Oliver
- Sanchez, J. E.
- Arzt, Eduard
- Saarländische Universitäts- und Landesbibliothek
Time of origin
- 2008
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High temperature properties of dispersion strengthened materials produced by mechanical alloying : current theoretical understanding and some practical implications
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Dispersion strengthening of Al films by oxygen ion implantation
Switchable microtopographies based on the two-way shape memory effect in nickel-titanium alloys
Assembly of gold nanoparticles into regular clusters inside emulsion droplets
Adhesion measurements on patterned elastomeric surfaces
Crystallization of nanoscaled colloids
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Arzt, Eduard, Prof. Dr.
Quantitative analysis of electromigration-induced damage in Al-based interconnects
1300-K compressive properties of a reaction milled NiAl-AlN composite
Electromigration failure by shape change of voids in bamboo lines
High temperature properties of dispersion strengthened materials produced by mechanical alloying : current theoretical understanding and some practical implications
Metallische Hochleistungswerkstoffe für hohe Temperaturen : Grundlagen und Perspektiven
Dispersion strengthening of Al films by oxygen ion implantation
Switchable microtopographies based on the two-way shape memory effect in nickel-titanium alloys
Assembly of gold nanoparticles into regular clusters inside emulsion droplets
Adhesion measurements on patterned elastomeric surfaces
Crystallization of nanoscaled colloids