Suppression of stacking fault expansion in a 4H-SiC epitaxial layer by proton irradiation

Location
Deutsche Nationalbibliothek Frankfurt am Main
ISSN
2045-2322
Extent
Online-Ressource
Language
Englisch
Notes
online resource.

Bibliographic citation
Suppression of stacking fault expansion in a 4H-SiC epitaxial layer by proton irradiation ; volume:12 ; number:1 ; day:15 ; month:8 ; year:2022 ; pages:1-8 ; date:12.2022
Scientific reports ; 12, Heft 1 (15.8.2022), 1-8, 12.2022

Creator
Harada, Shunta
Mii, Toshiki
Sakane, Hitoshi
Kato, Masashi
Contributor
SpringerLink (Online service)

DOI
10.1038/s41598-022-17060-y
URN
urn:nbn:de:101:1-2022102423062500443305
Rights
Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
Last update
15.08.2025, 7:23 AM CEST

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Associated

  • Harada, Shunta
  • Mii, Toshiki
  • Sakane, Hitoshi
  • Kato, Masashi
  • SpringerLink (Online service)

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