Ionization of sputtered material in high power impulse magnetron sputtering plasmas : comparison of titanium, chromium and aluminum
- Location
-
Deutsche Nationalbibliothek Frankfurt am Main
- Extent
-
Online-Ressource
- Language
-
Englisch
- Bibliographic citation
-
In: Plasma sources science and technology, 32, 6, S. 065006-1-065006-14
- Event
-
Veröffentlichung
- (where)
-
Bochum
- (who)
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Ruhr-Universität Bochum
- (when)
-
2023
- Creator
-
Held, Julian
Schulz-von der Gathen, Volker
Keudell, Achim von
- URN
-
urn:nbn:de:hbz:294-121659
- Rights
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Last update
-
15.08.2025, 7:28 AM CEST
Data provider
This object is provided by:
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Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Associated
- Held, Julian
- Schulz-von der Gathen, Volker
- Keudell, Achim von
- Ruhr-Universität Bochum
Time of origin
- 2023
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