Effects of electrode distance and target angles on elemental concentrations and film properties of Al-doped ZnO films prepared by magnetron co-sputtering
- Location
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Deutsche Nationalbibliothek Frankfurt am Main
- Extent
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Online-Ressource
- Language
-
Englisch
- Notes
-
In: 31st European Photovoltaic Solar Energy Conference and Exhibition : proceedings of the international conference held in Hamburg, Germany, 14 September - 18 September 2015. - München : WIP, 2015. - S. 1310-1314. - ISBN 3-936338-39-6
- Classification
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Physik
- Event
-
Veröffentlichung
- (where)
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Konstanz
- (who)
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Bibliothek der Universität Konstanz
- (when)
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2016
- Creator
-
Gorgulla, Angelika
Hagedorn, Kay
Hahn, Giso
Terheiden, Barbara
- URN
-
urn:nbn:de:bsz:352-0-346557
- Rights
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Last update
-
14.08.2025, 10:46 AM CEST
Data provider
This object is provided by:
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Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Associated
- Gorgulla, Angelika
- Hagedorn, Kay
- Hahn, Giso
- Terheiden, Barbara
- Bibliothek der Universität Konstanz
Time of origin
- 2016
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Entwicklung und Charakterisierung neuartiger Hochleistungssolarzellen
Influence of deposition parameters on elemental concentrations, electrical, and optical properties of magnetron co-sputtered Al-doped ZnO films
CVD Boron Containing Glasses - An Attractive Alternative Diffusion Source for High Quality Emitters and Simplified Processing : A Review
Bias-plasma Assisted RF Magnetron Sputter Deposition of Hydrogen-less Amorphous Silicon
Passivation of Si wafers by Al2O3 films with different surface conditioning
Contact formation in the silver/aluminium thick film firing process : a phenomenological approach
RuAl Thin‐Film Deposition by DC Magnetron Sputtering
Magnetron sputtering of magnetic thin film materials for spintronics
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Zinc Oxide Thin Film Transistors by Radio Frequency Magnetron Sputtering
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Capacitance-voltage spectroscopy and analysis of dielectric intrinsic amorphous silicon thin films
Entwicklung und Charakterisierung neuartiger Hochleistungssolarzellen
Influence of deposition parameters on elemental concentrations, electrical, and optical properties of magnetron co-sputtered Al-doped ZnO films
CVD Boron Containing Glasses - An Attractive Alternative Diffusion Source for High Quality Emitters and Simplified Processing : A Review
Bias-plasma Assisted RF Magnetron Sputter Deposition of Hydrogen-less Amorphous Silicon
Passivation of Si wafers by Al2O3 films with different surface conditioning
Contact formation in the silver/aluminium thick film firing process : a phenomenological approach
RuAl Thin‐Film Deposition by DC Magnetron Sputtering
Magnetron sputtering of magnetic thin film materials for spintronics
Fabrication of smooth SAC305 thin film via magnetron sputtering
Zinc Oxide Thin Film Transistors by Radio Frequency Magnetron Sputtering
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