Near field induced defects and influence of the liquid layer thickness in Steam Laser Cleaning of silicon wafers
- Standort
-
Deutsche Nationalbibliothek Frankfurt am Main
- Umfang
-
Online-Ressource
- Sprache
-
Englisch
- Erschienen in
-
In: Applied Physics / A, Materials Science and Processing ; 77 (2003), 1. - S. 117-123
- Klassifikation
-
Physik
- Ereignis
-
Veröffentlichung
- (wo)
-
Konstanz
- (wer)
-
Bibliothek der Universität Konstanz
- (wann)
-
2007
- Urheber
- URN
-
urn:nbn:de:bsz:352-opus-27668
- Rechteinformation
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Letzte Aktualisierung
-
25.03.2025, 13:51 MEZ
Datenpartner
Dieses Objekt wird bereitgestellt von:
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Beteiligte
- Lang, Florian
- Mosbacher, Mario
- Leiderer, Paul
- Bibliothek der Universität Konstanz
Entstanden
- 2007
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