A positively biased external anode for energy control of plasma ions: hollow cathode and magnetron sputtering discharge
- Location
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Deutsche Nationalbibliothek Frankfurt am Main
- Extent
-
Online-Ressource
- Language
-
Englisch
- Bibliographic citation
-
In: Plasma Sources Science and Technology 30, 4, 045003
- Keyword
-
-
- Event
-
Veröffentlichung
- (where)
-
Greifswald
- (who)
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Universität Greifswald
- (when)
-
2021
- Creator
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Hippler, Rainer
Cada, Martin
Hubicka, Zdenek
- DOI
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10.1088/1361-6595/abe0cc
- URN
-
urn:nbn:de:gbv:9-opus-59248
- Rights
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Last update
-
15.08.2025, 7:35 AM CEST
Data provider
This object is provided by:
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Associated
- Hippler, Rainer
- Cada, Martin
- Hubicka, Zdenek
- Universität Greifswald
Time of origin
- 2021
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An Investigation of Target Poisoning during Reactive Magnetron Sputtering
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