Hochschulschrift
Konzeption, Realisierung und Bewertung eines Prozesses zur Integration von MEMS in Polymer
- Location
-
Deutsche Nationalbibliothek Frankfurt am Main
- ISBN
-
9783862471522
- Dimensions
-
24 cm
- Extent
-
ca. 220 S. in getr. Zählung
- Language
-
Deutsch
- Notes
-
Ill., graph. Darst.
Zugl.: Freiburg (Breisgau), Univ., Diss., 2010
- Bibliographic citation
-
Advanced process and production technologies for micro systems made of metals, silicon and polymers (IMTEK Freiburg) / Albert-Ludwigs-Universität Freiburg ; Vol. 6
- Classification
-
Elektrotechnik, Elektronik
- Keyword
-
MEMS
Siliciumbauelement
Mikropumpe
Mikrofluidik
Leiterbahn
Heißprägen
Kunststoff
Verbindungstechnik
- Event
-
Veröffentlichung
- (where)
-
Uelvesbüll
- (who)
-
Der Andere Verl.
- (when)
-
2011
- Creator
- Table of contents
- Rights
-
Bei diesem Objekt liegt nur das Inhaltsverzeichnis digital vor. Der Zugriff darauf ist unbeschränkt möglich.
- Last update
-
11.06.2025, 1:51 PM CEST
Data provider
This object is provided by:
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Object type
- Hochschulschrift
Associated
- May, Johanna F.
- Der Andere Verl.
Time of origin
- 2011
Other Objects (12)
Miniaturization limits of MEMS accelerometers
Silicon MEMS technologies for novel neural probes
Active electrostatic MEMS bearing for inertial sensing applications
Evaluation of viscoelastic materials for MEMS by creep compliance analysis
Particle simulation of MEMS,NEMS components and processes - theory, software design and applications
MEMS-based thermal emitters and beyond : components and investigations for miniaturised NDIR systems
Polymer elasticity effects during thermal nanoimprint
Polymer-based microimplants for the neurosciences
Dynamik und Effizienz von Polymer-Elektrolyt-Brennstoffzellen
Inkjet printing of ionic liquid-polymer gels
Multiparametrische RNA-Analytik auf Polymer-basierten DNA-Microarrays
Managing MEMS NEMS technology development teams in the early phases of the innovation process : an exploratory investigation by case study research
Miniaturization limits of MEMS accelerometers
Silicon MEMS technologies for novel neural probes
Active electrostatic MEMS bearing for inertial sensing applications
Evaluation of viscoelastic materials for MEMS by creep compliance analysis
Particle simulation of MEMS,NEMS components and processes - theory, software design and applications
MEMS-based thermal emitters and beyond : components and investigations for miniaturised NDIR systems
Polymer elasticity effects during thermal nanoimprint
Polymer-based microimplants for the neurosciences
Dynamik und Effizienz von Polymer-Elektrolyt-Brennstoffzellen
Inkjet printing of ionic liquid-polymer gels
Multiparametrische RNA-Analytik auf Polymer-basierten DNA-Microarrays
Managing MEMS NEMS technology development teams in the early phases of the innovation process : an exploratory investigation by case study research
Miniaturization limits of MEMS accelerometers
Silicon MEMS technologies for novel neural probes
Active electrostatic MEMS bearing for inertial sensing applications
Evaluation of viscoelastic materials for MEMS by creep compliance analysis
Particle simulation of MEMS,NEMS components and processes - theory, software design and applications
MEMS-based thermal emitters and beyond : components and investigations for miniaturised NDIR systems
Polymer elasticity effects during thermal nanoimprint
Polymer-based microimplants for the neurosciences
Dynamik und Effizienz von Polymer-Elektrolyt-Brennstoffzellen
Inkjet printing of ionic liquid-polymer gels
Multiparametrische RNA-Analytik auf Polymer-basierten DNA-Microarrays