Hochschulschrift
Active electrostatic MEMS bearing for inertial sensing applications
- Location
-
Deutsche Nationalbibliothek Frankfurt am Main
- ISBN
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9783862473168
- Dimensions
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24 cm
- Extent
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XVI, 175 S.
- Language
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Englisch
- Notes
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Ill., graph. Darst.
Zugl.: Zürich, Techn. Hochsch., Diss., 2012
- Bibliographic citation
-
Scientific reports on micro and nanosystems ; Vol. 15
- Keyword
-
Drehratensensor
MEMS
Systementwicklung
Fertigung
- Event
-
Veröffentlichung
- (where)
-
Uelvesbüll
- (who)
-
Der Andere Verl.
- (when)
-
2012
- Creator
- Table of contents
- Rights
-
Bei diesem Objekt liegt nur das Inhaltsverzeichnis digital vor. Der Zugriff darauf ist unbeschränkt möglich.
- Last update
-
11.03.2025, 11:43 AM CET
Data provider
This object is provided by:
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Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Object type
- Hochschulschrift
Associated
- Kühne, Stéphane
- Der Andere Verl.
Time of origin
- 2012
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