Hochschulschrift
Active electrostatic MEMS bearing for inertial sensing applications
- Standort
-
Deutsche Nationalbibliothek Frankfurt am Main
- ISBN
-
9783862473168
- Maße
-
24 cm
- Umfang
-
XVI, 175 S.
- Sprache
-
Englisch
- Anmerkungen
-
Ill., graph. Darst.
Zugl.: Zürich, Techn. Hochsch., Diss., 2012
- Erschienen in
-
Scientific reports on micro and nanosystems ; Vol. 15
- Schlagwort
-
Drehratensensor
MEMS
Systementwicklung
Fertigung
- Ereignis
-
Veröffentlichung
- (wo)
-
Uelvesbüll
- (wer)
-
Der Andere Verl.
- (wann)
-
2012
- Urheber
- Inhaltsverzeichnis
- Rechteinformation
-
Bei diesem Objekt liegt nur das Inhaltsverzeichnis digital vor. Der Zugriff darauf ist unbeschränkt möglich.
- Letzte Aktualisierung
-
11.06.2025, 13:52 MESZ
Datenpartner
Dieses Objekt wird bereitgestellt von:
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Objekttyp
- Hochschulschrift
Beteiligte
- Kühne, Stéphane
- Der Andere Verl.
Entstanden
- 2012
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