Copper tantalum nitride (CuTaN2) thin films prepared by reactive radio-frequency magnetron sputtering

Location
Deutsche Nationalbibliothek Frankfurt am Main
Extent
1 Online-Ressource.
Language
Englisch

Bibliographic citation
Copper tantalum nitride (CuTaN2) thin films prepared by reactive radio-frequency magnetron sputtering ; volume:130 ; number:6 ; day:9 ; month:5 ; year:2024 ; pages:1-10 ; date:6.2024
Applied physics / A. A, Materials science & processing ; 130, Heft 6 (9.5.2024), 1-10, 6.2024

Creator
Islam, Md Maidul
Ranga, Abhishek Goud
Borra, Vamsi
Georgiev, Daniel G.
Contributor
SpringerLink (Online service)

DOI
10.1007/s00339-024-07537-0
URN
urn:nbn:de:101:1-2407190834116.689714413245
Rights
Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
Last update
14.08.2025, 10:49 AM CEST

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Associated

  • Islam, Md Maidul
  • Ranga, Abhishek Goud
  • Borra, Vamsi
  • Georgiev, Daniel G.
  • SpringerLink (Online service)

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