Piezoelectric Properties of Zinc Oxide Thin Films Grown by Plasma‐Enhanced Atomic Layer Deposition
Zinc oxide (ZnO) thin films are deposited by plasma‐enhanced atomic layer deposition (PE‐ALD). This deposition method allows depositing stoichiometric and highly resistive ZnO films at room temperature. Despite such important requirements for piezoelectricity being met, not much is known in literature about the piezoelectric properties of ZnO thin films (<70 nm) deposited by PE‐ALD. The films are grown at different substrate temperatures to investigate the effect on crystalline and piezoelectric properties. Films deposited on flexible poly (ethylene terephthalate) (PET) generated a higher piezoelectric current (>1.8 nA) and charge (>80 pC) compared with films deposited on glass (>0.3 nA and >30 pC) due to bending effects of the substrate when mechanically excited. Furthermore, increasing the substrate temperature, during deposition, enhances the growth along the (002) crystallographic orientation, which further strengthens the generated piezoelectric current signal for mechanical excitations along the ZnO film's c‐axis.
- Location
-
Deutsche Nationalbibliothek Frankfurt am Main
- Extent
-
Online-Ressource
- Language
-
Englisch
- Bibliographic citation
-
Piezoelectric Properties of Zinc Oxide Thin Films Grown by Plasma‐Enhanced Atomic Layer Deposition ; volume:217 ; number:21 ; year:2020 ; extent:6
Physica status solidi / A. A, Applications and materials science ; 217, Heft 21 (2020) (gesamt 6)
- Creator
-
Abu Ali, Taher
Pilz, Julian
Schäffner, Philipp
Kratzer, Markus
Teichert, Christian
Stadlober, Barbara
Coclite, Anna Maria
- DOI
-
10.1002/pssa.202000319
- URN
-
urn:nbn:de:101:1-2022062408004908686805
- Rights
-
Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Last update
-
15.08.2025, 7:34 AM CEST
Data provider
This object is provided by:
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Associated
- Abu Ali, Taher
- Pilz, Julian
- Schäffner, Philipp
- Kratzer, Markus
- Teichert, Christian
- Stadlober, Barbara
- Coclite, Anna Maria
Other Objects (12)
Atomic layer deposition of zinc based transparent conductive oxides
ZnO Thin Films Grown by Plasma‐Enhanced Atomic Layer Deposition: Material Properties Within and Outside the “Atomic Layer Deposition Window”
The conductivity behavior of zinc oxide deposited by atomic layer deposition
Electronic band offset determination of oxides grown by atomic layer deposition on silicon
Quantum size effects in TiO2 thin films grown by atomic layer deposition
Stable chemical enhancement of passivating nanolayer structures grown by atomic layer deposition on silicon
Alumina‐Protected, Durable and Photostable Zinc Sulfide Particles from Scalable Atomic Layer Deposition
On the Piezoelectric Properties of Zinc Oxide Thin Films Synthesized by Plasma Assisted DC Sputter Deposition
High-temperature stable piezoelectric transducers using epitaxially grown electrodes
Resistive switching phenomena in stacks of binary transition metal oxides grown by atomic layer deposition
Evolution of microstructure and related optical properties of ZnO grown by atomic layer deposition
Properties of tin oxide films grown by atomic layer deposition from tin tetraiodide and ozone
Atomic layer deposition of zinc based transparent conductive oxides
ZnO Thin Films Grown by Plasma‐Enhanced Atomic Layer Deposition: Material Properties Within and Outside the “Atomic Layer Deposition Window”
The conductivity behavior of zinc oxide deposited by atomic layer deposition
Electronic band offset determination of oxides grown by atomic layer deposition on silicon
Quantum size effects in TiO2 thin films grown by atomic layer deposition
Stable chemical enhancement of passivating nanolayer structures grown by atomic layer deposition on silicon
Alumina‐Protected, Durable and Photostable Zinc Sulfide Particles from Scalable Atomic Layer Deposition
On the Piezoelectric Properties of Zinc Oxide Thin Films Synthesized by Plasma Assisted DC Sputter Deposition
High-temperature stable piezoelectric transducers using epitaxially grown electrodes
Resistive switching phenomena in stacks of binary transition metal oxides grown by atomic layer deposition
Evolution of microstructure and related optical properties of ZnO grown by atomic layer deposition
Properties of tin oxide films grown by atomic layer deposition from tin tetraiodide and ozone
Atomic layer deposition of zinc based transparent conductive oxides
ZnO Thin Films Grown by Plasma‐Enhanced Atomic Layer Deposition: Material Properties Within and Outside the “Atomic Layer Deposition Window”
The conductivity behavior of zinc oxide deposited by atomic layer deposition
Electronic band offset determination of oxides grown by atomic layer deposition on silicon
Quantum size effects in TiO2 thin films grown by atomic layer deposition
Stable chemical enhancement of passivating nanolayer structures grown by atomic layer deposition on silicon
Alumina‐Protected, Durable and Photostable Zinc Sulfide Particles from Scalable Atomic Layer Deposition
On the Piezoelectric Properties of Zinc Oxide Thin Films Synthesized by Plasma Assisted DC Sputter Deposition
High-temperature stable piezoelectric transducers using epitaxially grown electrodes
Resistive switching phenomena in stacks of binary transition metal oxides grown by atomic layer deposition
Evolution of microstructure and related optical properties of ZnO grown by atomic layer deposition