The Study of Electrical Properties for Multilayer La2O3/Al2O3 Dielectric Stacks and LaAlO3 Dielectric Film Deposited by ALD
- Location
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Deutsche Nationalbibliothek Frankfurt am Main
- ISSN
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1556-276X
- Extent
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Online-Ressource
- Language
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Englisch
- Notes
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online resource.
- Bibliographic citation
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The Study of Electrical Properties for Multilayer La2O3/Al2O3 Dielectric Stacks and LaAlO3 Dielectric Film Deposited by ALD ; volume:12 ; number:1 ; day:29 ; month:3 ; year:2017 ; pages:1-4 ; date:12.2017
Nanoscale research letters ; 12, Heft 1 (29.3.2017), 1-4, 12.2017
- Classification
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Physik
- Creator
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Feng, Xing-Yao
- Contributor
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Liu, Hong-Xia
Wang, Xing
Zhao, Lu
Fei, Chen-Xi
Liu, He-Lei
SpringerLink (Online service)
- DOI
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10.1186/s11671-017-2004-1
- URN
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urn:nbn:de:1111-2017041613878
- Rights
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Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Last update
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15.08.2025, 7:31 AM CEST
Data provider
This object is provided by:
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Associated
- Feng, Xing-Yao
- Liu, Hong-Xia
- Wang, Xing
- Zhao, Lu
- Fei, Chen-Xi
- Liu, He-Lei
- SpringerLink (Online service)
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