Advanced in-situ electron-beam lithography for deterministic nanophotonic device processing

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Location
Deutsche Nationalbibliothek Frankfurt am Main
Extent
Online-Ressource
Language
Englisch

Bibliographic citation
In: Review of Scientific Instruments (86:7) - Melville, NY : American Institute of Physics (AIP) - Art.-Id. 073903

Event
Veröffentlichung
(where)
Berlin
(who)
Technische Universität Berlin
(when)
2020
Creator
Kaganskiy, Arsenty
Gschrey, Manuel
Schlehahn, Alexander
Schmidt, Ronny
Schulze, Jan-Hindrik
Heindel, Tobias
Strittmatter, André
Rodt, Sven
Reitzenstein, Stephan

DOI
10.14279/depositonce-10051
Handle
11303/11160
URN
urn:nbn:de:101:1-2020052002063565968163
Rights
Der Zugriff auf das Objekt ist unbeschränkt möglich.
Last update
25.03.2025, 1:42 PM CET

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Associated

  • Kaganskiy, Arsenty
  • Gschrey, Manuel
  • Schlehahn, Alexander
  • Schmidt, Ronny
  • Schulze, Jan-Hindrik
  • Heindel, Tobias
  • Strittmatter, André
  • Rodt, Sven
  • Reitzenstein, Stephan
  • Technische Universität Berlin

Time of origin

  • 2020

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