Machine learning enhanced in situ electron beam lithography of photonic nanostructures
- Standort
-
Deutsche Nationalbibliothek Frankfurt am Main
- Umfang
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Online-Ressource
- Sprache
-
Englisch
- Erschienen in
-
In: Nanoscale (14:39) - Cambridge : Royal Society of Chemistry (RSC) - S. 14529-14536
- Ereignis
-
Veröffentlichung
- (wo)
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Berlin
- (wer)
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Technische Universität Berlin
- (wann)
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2022
- Urheber
-
Donges, Jan
Schlischka, Marvin
Shih, Ching-Wen
Pengerla, Monica
Limame, Imad
Schall, Johannes
Bremer, Lucas
Rodt, Sven
Reitzenstein, Stephan
- DOI
-
10.14279/depositonce-16460
- Handle
-
11303/17675
- URN
-
urn:nbn:de:101:1-2022112300594568304598
- Rechteinformation
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Letzte Aktualisierung
-
25.03.2025, 13:44 MEZ
Datenpartner
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Beteiligte
- Donges, Jan
- Schlischka, Marvin
- Shih, Ching-Wen
- Pengerla, Monica
- Limame, Imad
- Schall, Johannes
- Bremer, Lucas
- Rodt, Sven
- Reitzenstein, Stephan
- Technische Universität Berlin
Entstanden
- 2022
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