High Potential Columnar Nanocrystalline AlN Films Deposited by RF Reactive Magnetron Sputtering
- Location
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Deutsche Nationalbibliothek Frankfurt am Main
- ISSN
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2150-5551
- Extent
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Online-Ressource
- Language
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Englisch
- Notes
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online resource.
- Bibliographic citation
-
High Potential Columnar Nanocrystalline AlN Films Deposited by RF Reactive Magnetron Sputtering ; volume:4 ; number:1 ; day:19 ; month:3 ; year:2012 ; pages:40-44 ; date:3.2012
Nano-Micro letters ; 4, Heft 1 (19.3.2012), 40-44, 3.2012
- Creator
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Han, Chengzhang
- Contributor
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Chen, Da
Zhang, Yaozhong
Xu, Dong
Liu, Yijian
Kong, Eric Siu-Wai
Zhang, Yafei
SpringerLink (Online service)
- DOI
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10.1007/BF03353690
- URN
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urn:nbn:de:1111-2016052052131
- Rights
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Last update
-
14.08.2025, 10:45 AM CEST
Data provider
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Associated
- Han, Chengzhang
- Chen, Da
- Zhang, Yaozhong
- Xu, Dong
- Liu, Yijian
- Kong, Eric Siu-Wai
- Zhang, Yafei
- SpringerLink (Online service)
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