Structural, optical, and mechanical properties of silicon nitride films deposited by inductively coupled plasma enhanced chemical vapor deposition
- Standort
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Deutsche Nationalbibliothek Frankfurt am Main
- Umfang
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Online-Ressource
- Sprache
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Englisch
- Anmerkungen
-
In:
Abacıoğlu, E., Fernández Estévez, J. L., & Stöhr, A. (2022). Structural, optical, and mechanical properties of silicon nitride films deposited by inductively coupled plasma enhanced chemical vapor deposition. In: Advanced Properties and Processes in Optoelectronic Materials and Systems (APROPOS 18): book of abstracts. Center for Physical Sciences and Technology, Vilnius, Lithuania, p. 79. ISBN 978-609-96355-0-7
https://www.ftmc.lt/uploads/APROPOS18/APROPOS18_abstract_book_ISBN%20978-609-96355-0-7.pdf
- Klassifikation
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Elektrotechnik, Elektronik
- Ereignis
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Veröffentlichung
- (wo)
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Duisburg, Essen
- (wer)
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Universität Duisburg-Essen
- (wann)
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2022
- Urheber
- DOI
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10.17185/duepublico/78077
- URN
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urn:nbn:de:hbz:465-20230403-102820-7
- Rechteinformation
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Open Access unbekannt; Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Letzte Aktualisierung
-
14.08.2025, 10:48 MESZ
Datenpartner
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Beteiligte
- Abacıoğlu, Ezgi
- Fernández Estévez, José Luis
- Stöhr, Andreas
- Universität Duisburg-Essen
Entstanden
- 2022
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