Metalorganic chemical vapor deposition (MOCVD) routes for fabrication of rare earth nitride thin films : precursor evaluation, thin film deposition and characterization
- Standort
-
Deutsche Nationalbibliothek Frankfurt am Main
- Umfang
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Online-Ressource
- Sprache
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Englisch
- Anmerkungen
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Bochum, Ruhr-Universität Bochum, Dissertation, 2014
- Schlagwort
-
Thin films
Evaluation
Chemical vapor deposition
Nitride
Dampfabscheidung
MOCVD-Verfahren
Präkursor
Lanthanoide
Erde
- Ereignis
-
Veröffentlichung
- (wo)
-
Bochum
- (wer)
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Ruhr-Universität Bochum
- (wann)
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2014
- Urheber
- Beteiligte Personen und Organisationen
-
Fischer, Roland A.
Devi, Anjana
Fakultät für Chemie und Biochemie
- URN
-
urn:nbn:de:hbz:294-41427
- Rechteinformation
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Letzte Aktualisierung
-
25.03.2025, 13:44 MEZ
Datenpartner
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Beteiligte
- Krasnopolski, Michael
- Fischer, Roland A.
- Devi, Anjana
- Fakultät für Chemie und Biochemie
- Ruhr-Universität Bochum
Entstanden
- 2014
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