Metalorganic chemical vapor deposition (MOCVD) routes for fabrication of rare earth nitride thin films : precursor evaluation, thin film deposition and characterization
- Location
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Deutsche Nationalbibliothek Frankfurt am Main
- Extent
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Online-Ressource
- Language
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Englisch
- Notes
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Bochum, Ruhr-Universität Bochum, Dissertation, 2014
- Keyword
-
Thin films
Evaluation
Chemical vapor deposition
Nitride
Dampfabscheidung
MOCVD-Verfahren
Präkursor
Lanthanoide
Erde
- Event
-
Veröffentlichung
- (where)
-
Bochum
- (who)
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Ruhr-Universität Bochum
- (when)
-
2014
- Creator
- Contributor
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Fischer, Roland A.
Devi, Anjana
Fakultät für Chemie und Biochemie
- URN
-
urn:nbn:de:hbz:294-41427
- Rights
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Last update
-
25.03.2025, 1:44 PM CET
Data provider
This object is provided by:
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Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Associated
- Krasnopolski, Michael
- Fischer, Roland A.
- Devi, Anjana
- Fakultät für Chemie und Biochemie
- Ruhr-Universität Bochum
Time of origin
- 2014
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