Restorative Self-Image of Rough-Line Grids: Application to Coherent EUV Talbot Lithography
- Standort
-
Deutsche Nationalbibliothek Frankfurt am Main
- Umfang
-
Online-Ressource
- Sprache
-
Englisch
- Erschienen in
-
In: 10.1109/JPHOT.2016.2553847
- Ereignis
-
Veröffentlichung
- (wo)
-
Aachen
- (wer)
-
Universitätsbibliothek der RWTH Aachen
- (wann)
-
2016
- Urheber
- DOI
-
10.18154/RWTH-2016-04166
- URN
-
urn:nbn:de:101:1-2019061714535334665850
- Rechteinformation
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Letzte Aktualisierung
-
25.03.2025, 13:42 MEZ
Datenpartner
Dieses Objekt wird bereitgestellt von:
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Beteiligte
- Kim, Hyun-su
- Li, Wei
- Marconi, Mario C.
- Brocklesby, William S.
- Juschkin, Larissa
- Universitätsbibliothek der RWTH Aachen
Entstanden
- 2016
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