Surface passivation and optical characterization of Al2O3/a-SiCx stacks on c-Si substrates

Location
Deutsche Nationalbibliothek Frankfurt am Main
Extent
Online-Ressource

Bibliographic citation
Surface passivation and optical characterization of Al2O3/a-SiCx stacks on c-Si substrates ; volume:4 ; pages:726-731
Beilstein journal of nanotechnology ; 4, 726-731

Classification
Ingenieurwissenschaften und Maschinenbau

DOI
10.3762/bjnano.4.82
URN
urn:nbn:de:101:1-2014052313281
Rights
Der Zugriff auf das Objekt ist unbeschränkt möglich.
Last update
14.08.2025, 10:45 AM CEST

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