Monte Carlo simulations concerning modeling DC and high power pulsed magnetron sputtering for Ti₃SiC₂ including high pressures and ion deposition probabilities
- Location
-
Deutsche Nationalbibliothek Frankfurt am Main
- Extent
-
Online-Ressource
- Language
-
Englisch
- Bibliographic citation
-
In: Preprints aus dem Institut für Mathematik ; 6
- Event
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Veröffentlichung
- (where)
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Berlin
- (who)
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Humboldt-Universität zu Berlin
- (when)
-
2011
- Creator
- DOI
-
10.18452/2823
- URN
-
urn:nbn:de:kobv:11-100193394
- Rights
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Last update
-
14.08.2025, 10:59 AM CEST
Data provider
This object is provided by:
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Associated
- Geiser, Jürgen
- Humboldt-Universität zu Berlin
Time of origin
- 2011
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