Characterization and Process Development of CVD/ALD-based Cu(Mn)/Co(W) Interconnect System
- Location
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Deutsche Nationalbibliothek Frankfurt am Main
- Extent
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Online-Ressource
- Language
-
Englisch
- Notes
-
In: AMC 2015 – Advanced Metallization Conference
- Keyword
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Atomlagenabscheidung
CVD-Verfahren
Atomsonde
- Event
-
Veröffentlichung
- (where)
-
Chemnitz
- (who)
-
Universitätsbibliothek Chemnitz
- (when)
-
2016
- Event
-
Veröffentlichung
- (where)
-
Chemnitz
- (who)
-
Technische Universität Chemnitz
- (when)
-
2016
- Creator
-
Shima, Kohei
Tu, Yuan
Han, Bin
Takamizawa, Hisashi
Shimizu, Hideharu
Shimizu, Yasuo
Momose, Takeshi
Inoue, Koji
Nagai, Yasuyoshi
Shimogaki, Yukihiro
- URN
-
urn:nbn:de:bsz:ch1-qucosa-207279
- Rights
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Last update
-
14.08.2025, 11:01 AM CEST
Data provider
This object is provided by:
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Associated
- Shima, Kohei
- Tu, Yuan
- Han, Bin
- Takamizawa, Hisashi
- Shimizu, Hideharu
- Shimizu, Yasuo
- Momose, Takeshi
- Inoue, Koji
- Nagai, Yasuyoshi
- Shimogaki, Yukihiro
- Universitätsbibliothek Chemnitz
- Technische Universität Chemnitz
Time of origin
- 2016
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