Moisture barrier properties of thin organic-inorganic multilayers prepared by plasma-enhanced ALD and CVD in one reactor
- Location
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Deutsche Nationalbibliothek Frankfurt am Main
- ISSN
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1556-276X
- Extent
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Online-Ressource
- Language
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Englisch
- Notes
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online resource.
- Bibliographic citation
-
Moisture barrier properties of thin organic-inorganic multilayers prepared by plasma-enhanced ALD and CVD in one reactor ; volume:9 ; number:1 ; day:7 ; month:5 ; year:2014 ; pages:1-6 ; date:12.2014
Nanoscale research letters ; 9, Heft 1 (7.5.2014), 1-6, 12.2014
- Creator
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Bülow, Tim
Gargouri, Hassan
Siebert, Mirko
Rudolph, Rolf
Johannes, Hans-Hermann
Kowalsky, Wolfgang
- Contributor
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SpringerLink (Online service)
- DOI
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10.1186/1556-276X-9-223
- URN
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urn:nbn:de:101:1-2019102821205381788906
- Rights
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Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Last update
-
15.08.2025, 7:21 AM CEST
Data provider
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Associated
- Bülow, Tim
- Gargouri, Hassan
- Siebert, Mirko
- Rudolph, Rolf
- Johannes, Hans-Hermann
- Kowalsky, Wolfgang
- SpringerLink (Online service)
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