Fundamental Investigations in the Design of Five-Axis Nanopositioning Machines for Measurement and Fabrication Purposes

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Location: Deutsche Nationalbibliothek Frankfurt am Main

ISSN: 2520-8128

Extent: Online-Ressource

Language: Englisch

Notes: online resource.

Bibliographic citation: Fundamental Investigations in the Design of Five-Axis Nanopositioning Machines for Measurement and Fabrication Purposes ; volume:4 ; number:3 ; day:20 ; month:4 ; year:2021 ; pages:156-164 ; date:9.2021
Nanomanufacturing and metrology ; 4, Heft 3 (20.4.2021), 156-164, 9.2021

Creator: Schienbein, Ralf
Fern, Florian
Theska, René
Supreeti, Shraddha
Füßl, Roland
Manske, Eberhard

Contributor: SpringerLink (Online service)

DOI: 10.1007/s41871-021-00102-w

URN: urn:nbn:de:101:1-2021112706262693222487

Rights: Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.

Last update: 2025-08-15T07:31:22+0200

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Fundamental Investigations in the Design of Five-Axis Nanopositioning Machines for Measurement and Fabrication Purposes

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Other Objects (12)

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