Fabrication of Anti-reflecting Si Nano-structures with Low Aspect Ratio by Nano-sphere Lithography Technique

Location
Deutsche Nationalbibliothek Frankfurt am Main
ISSN
2150-5551
Extent
Online-Ressource
Language
Englisch
Notes
online resource.

Bibliographic citation
Fabrication of Anti-reflecting Si Nano-structures with Low Aspect Ratio by Nano-sphere Lithography Technique ; volume:5 ; number:1 ; day:10 ; month:3 ; year:2013 ; pages:18-25 ; date:3.2013
Nano-Micro letters ; 5, Heft 1 (10.3.2013), 18-25, 3.2013

Creator
Sun, Shenghua
Contributor
Lu, Peng
Xu, Jun
Xu, Ling
Chen, Kunji
Wang, Qimin
Zuo, Yuhua
SpringerLink (Online service)

DOI
10.1007/BF03353727
URN
urn:nbn:de:1111-2016052052530
Rights
Der Zugriff auf das Objekt ist unbeschränkt möglich.
Last update
14.08.2025, 10:56 AM CEST

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Associated

  • Sun, Shenghua
  • Lu, Peng
  • Xu, Jun
  • Xu, Ling
  • Chen, Kunji
  • Wang, Qimin
  • Zuo, Yuhua
  • SpringerLink (Online service)

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