- Sprache
-
Englisch
- Identifier
-
1152094505
Thema
Abscheidung; Fotolithografie; Kupfer; Halbleitertechnologie; Ultraviolett-Bestrahlung
Beteiligte Personen und Organisationen
- DOI
-
10.22028/D291-26904
- URN
- Rechteinformation
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Letzte Aktualisierung
-
26.01.2023, 13:53 MEZ
Objekttyp
- Monografie
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