- Location
-
Deutsche Nationalbibliothek Frankfurt am Main
- Dimensions
-
21 cm
- Extent
-
VII, 121 S.
- Edition
-
Als Ms. gedr.
- Language
-
Englisch
- Notes
-
Ill., graph. Darst.
Zugl.: Stuttgart, Univ., Diss., 2001
- Bibliographic citation
-
Bericht / Max-Planck-Institut für Metallforschung ; Nr. 112
- Keyword
-
Mikrosystemtechnik
Silber
Dünne Schicht
Siliciumdioxid
Materialermüdung
Size-Effekt
Kupfer
Dünne Schicht
Polyimide
Materialermüdung
Werkstoffschädigung
Size-Effekt
- Event
-
Veröffentlichung
- (where)
-
Stuttgart
- (who)
-
Max-Planck-Inst. für Metallforschung
- (when)
-
2001
- Contributor
-
Schwaiger, Ruth
- Table of contents
- Rights
-
Bei diesem Objekt liegt nur das Inhaltsverzeichnis digital vor. Der Zugriff darauf ist unbeschränkt möglich.
- Last update
-
11.06.2025, 1:57 PM CEST
Data provider
This object is provided by:
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Object type
- Hochschulschrift
Associated
- Schwaiger, Ruth
- Max-Planck-Inst. für Metallforschung
Time of origin
- 2001
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