MEMS : [micro-electro-mechanical systems] ; a practical guide to design, analysis, and applications
While the first generation of MEMS books comprehensively cover fabrication techniques, a lack of industry standards has created a void of books providing cohesive guidance on the design and analysis of micro-electro-mechanical systems (MEMS) across their wide range of innovative and varied applications. This book is the first to fill the void with 18 chapters written by leading experts worldwide covering topics such as transducer operations, topology simulation, and modeling, free-space microsystems, interface circuitry, magnetic, mechanical, chemical, thermal, and fluid microsensors, biomedical microsystems, integrated micro- optics, microactuators, and micromachining. The chapters address issues of alternative designs, reliability, performance, production, packaging, and cost effectiveness in the context of appropriate applications including automotive, biomedical, consumer, building, and industrial products. TOC:Introduction.- Microtransducer Operation.- Material Properties: Measurement And Data.- Topology S Imulation For Microtransducers.- Microtransducer Modeling And S Imulation.- System-Level S Imulation Of Microsystems.- Thermal-Based Sensors.- Photon Detectors.- Free- Space Microsystems.- Integrated Micro-Optics.- Magnetic Microsensors.- Mechanical Microsensors.- Chemical Microsensors.- Fluidic Microsystems.- Biomedical Microsystems.- Microactuators.- Micromachining Technology.- Electrodeposition Techology For Mems.- Liga Technologies.- Interface Circuitry And Microsystems.
- Location
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Deutsche Nationalbibliothek Frankfurt am Main
- ISBN
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9783540211174
3540211179
9780815514978
0815514972
- Dimensions
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24 cm
- Extent
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XXV, 965 S.
- Language
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Englisch
- Notes
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Ill., graph. Darst.
Literaturangaben
- Classification
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Ingenieurwissenschaften und Maschinenbau
- Keyword
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MEMS
- Event
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Veröffentlichung
- (where)
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Norwich, NY, Heidelberg
- (who)
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Andrew, Springer
- (when)
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2006
- Contributor
- Table of contents
- Rights
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Bei diesem Objekt liegt nur das Inhaltsverzeichnis digital vor. Der Zugriff darauf ist unbeschränkt möglich.
- Last update
-
11.06.2025, 1:50 PM CEST
Data provider
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Associated
- Korvink, Jan G.
- Andrew, Springer
Time of origin
- 2006
Other Objects (12)
Microsystems : Micro-Electro-Mechanical Systems (MEMS)
Mikrosysteme : Micro-Electro-Mechaical Systems (MEMS)
Traceable force calibration of micro-electro-mechanical systems
Model order reduction of electro-thermal MEMS
3D patterning – an extended toolbox for micro-electro-mechanical systems
Practical guide to RF-MEMS
Slow rarefied flows : theory and application to micro-electro-mechanical systems
Air-gap based vertical cavity micro-opto-electro-mechanical Fabry-Perot filters
Fast simulation of electro-thermal MEMS : efficient dynamic compact models
Simulation methods for the mechanical nonlinearity in MEMS gyroscopes
Radio Frequency Device and System Design Using Radio Frequency Switches Based on Micro Electro Mechanical Systems
Conception, fabrication and characterization of mesoscopic micro-opto-electro-mechanical systems for the terahertz spectral range
Microsystems : Micro-Electro-Mechanical Systems (MEMS)
Mikrosysteme : Micro-Electro-Mechaical Systems (MEMS)
Traceable force calibration of micro-electro-mechanical systems
Model order reduction of electro-thermal MEMS
3D patterning – an extended toolbox for micro-electro-mechanical systems
Practical guide to RF-MEMS
Slow rarefied flows : theory and application to micro-electro-mechanical systems
Air-gap based vertical cavity micro-opto-electro-mechanical Fabry-Perot filters
Fast simulation of electro-thermal MEMS : efficient dynamic compact models
Simulation methods for the mechanical nonlinearity in MEMS gyroscopes
Radio Frequency Device and System Design Using Radio Frequency Switches Based on Micro Electro Mechanical Systems
Conception, fabrication and characterization of mesoscopic micro-opto-electro-mechanical systems for the terahertz spectral range
Microsystems : Micro-Electro-Mechanical Systems (MEMS)
Mikrosysteme : Micro-Electro-Mechaical Systems (MEMS)
Traceable force calibration of micro-electro-mechanical systems
Model order reduction of electro-thermal MEMS
3D patterning – an extended toolbox for micro-electro-mechanical systems
Practical guide to RF-MEMS
Slow rarefied flows : theory and application to micro-electro-mechanical systems
Air-gap based vertical cavity micro-opto-electro-mechanical Fabry-Perot filters
Fast simulation of electro-thermal MEMS : efficient dynamic compact models
Simulation methods for the mechanical nonlinearity in MEMS gyroscopes
Radio Frequency Device and System Design Using Radio Frequency Switches Based on Micro Electro Mechanical Systems