MEMS : [micro-electro-mechanical systems] ; a practical guide to design, analysis, and applications
While the first generation of MEMS books comprehensively cover fabrication techniques, a lack of industry standards has created a void of books providing cohesive guidance on the design and analysis of micro-electro-mechanical systems (MEMS) across their wide range of innovative and varied applications. This book is the first to fill the void with 18 chapters written by leading experts worldwide covering topics such as transducer operations, topology simulation, and modeling, free-space microsystems, interface circuitry, magnetic, mechanical, chemical, thermal, and fluid microsensors, biomedical microsystems, integrated micro- optics, microactuators, and micromachining. The chapters address issues of alternative designs, reliability, performance, production, packaging, and cost effectiveness in the context of appropriate applications including automotive, biomedical, consumer, building, and industrial products. TOC:Introduction.- Microtransducer Operation.- Material Properties: Measurement And Data.- Topology S Imulation For Microtransducers.- Microtransducer Modeling And S Imulation.- System-Level S Imulation Of Microsystems.- Thermal-Based Sensors.- Photon Detectors.- Free- Space Microsystems.- Integrated Micro-Optics.- Magnetic Microsensors.- Mechanical Microsensors.- Chemical Microsensors.- Fluidic Microsystems.- Biomedical Microsystems.- Microactuators.- Micromachining Technology.- Electrodeposition Techology For Mems.- Liga Technologies.- Interface Circuitry And Microsystems.
- Standort
-
Deutsche Nationalbibliothek Frankfurt am Main
- ISBN
-
9783540211174
3540211179
9780815514978
0815514972
- Maße
-
24 cm
- Umfang
-
XXV, 965 S.
- Sprache
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Englisch
- Anmerkungen
-
Ill., graph. Darst.
Literaturangaben
- Klassifikation
-
Ingenieurwissenschaften und Maschinenbau
- Schlagwort
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MEMS
- Ereignis
-
Veröffentlichung
- (wo)
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Norwich, NY, Heidelberg
- (wer)
-
Andrew, Springer
- (wann)
-
2006
- Beteiligte Personen und Organisationen
- Inhaltsverzeichnis
- Rechteinformation
-
Bei diesem Objekt liegt nur das Inhaltsverzeichnis digital vor. Der Zugriff darauf ist unbeschränkt möglich.
- Letzte Aktualisierung
-
11.06.2025, 13:50 MESZ
Datenpartner
Deutsche Nationalbibliothek. Bei Fragen zum Objekt wenden Sie sich bitte an den Datenpartner.
Beteiligte
- Korvink, Jan G.
- Andrew, Springer
Entstanden
- 2006
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