Optimizing the Crystallinity of a ZrO 2 Thin Film Insulator for InGaZnO‐Based Metal–Insulator–Semiconductor Capacitors

Location
Deutsche Nationalbibliothek Frankfurt am Main
Extent
Online-Ressource
Language
Englisch

Bibliographic citation
Optimizing the Crystallinity of a ZrO 2 Thin Film Insulator for InGaZnO‐Based Metal–Insulator–Semiconductor Capacitors ; day:22 ; month:01 ; year:2024 ; extent:6
Advanced materials interfaces ; (22.01.2024) (gesamt 6)

Creator
Nam, Minkyeong
Lee, Seungwoo
Jeong, Hanseok
Yoon, Ara
Park, Jin‐Seong
Jeon, Woojin

DOI
10.1002/admi.202300883
URN
urn:nbn:de:101:1-2024012314165990714970
Rights
Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
Last update
15.08.2025, 7:26 AM CEST

Data provider

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Associated

  • Nam, Minkyeong
  • Lee, Seungwoo
  • Jeong, Hanseok
  • Yoon, Ara
  • Park, Jin‐Seong
  • Jeon, Woojin

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