Hochschulschrift
Atomic vapor depositions of metal insulator metal capacitors : investigation, development and integration
- Standort
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Deutsche Nationalbibliothek Frankfurt am Main
- Umfang
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Online-Ressource
- Sprache
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Englisch
- Anmerkungen
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Oldenburg, Univ., Diss., 2010
- Klassifikation
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Elektrotechnik, Elektronik
- Schlagwort
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Metall-Isolator-Metall-System ; Kondensator ; Dielektrikum ; Dampfabscheidung ; Atomdampf
- Urheber
- URN
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urn:nbn:de:gbv:715-oops-10198
- Rechteinformation
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Letzte Aktualisierung
-
25.03.2025, 13:54 MEZ
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Objekttyp
- Hochschulschrift
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