- Location
-
Deutsche Nationalbibliothek Frankfurt am Main
- Extent
-
Online-Ressource
- Language
-
Deutsch
- Notes
-
In: Tagungsband 3. Symposium Elektronik und Systemintegration ESI, S. 81-86
- Keyword
-
Rauigkeit
Photoresist
Herstellung
München
- Event
-
Veröffentlichung
- (where)
-
Landshut
- (who)
-
Hochschule für Angewandte Wissenschaften Landshut
- (when)
-
2022
- Creator
-
Rebhan, Matthias E.
- Contributor
-
Artem, Ivanov
Marc, Bicker
Peter, Patzelt
- DOI
-
10.57688/364
- URN
-
urn:nbn:de:bvb:860-opus4-3641
- Rights
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Last update
-
25.03.2025, 1:52 PM CET
Data provider
This object is provided by:
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Associated
- Rebhan, Matthias E.
- Artem, Ivanov
- Marc, Bicker
- Peter, Patzelt
- Hochschule für Angewandte Wissenschaften Landshut
Time of origin
- 2022
Other Objects (12)
3D nano-tomography using coherent X-rays
True 3D measurements of micro and nano structures
Metal nano 3D superlattices : synthesis, properties, and applications
Nano-prototyping and 3D bioimaging with dual beam microscopy
SEM-based nano-analytical methods for 3D semiconductor microstructures
Investigation of 3D nano printed on-chip hollow core waveguides
Computational workflow optimization for magnetic fluctuation measurements of 3D nano-tetrapods
3D Druck
NANo
First-order reversal curves (FORCs) of nano-engineered 3D Co-Fe structures
Galvanoformen von nano-Nickel und nano-Invar
Magnetic domain walls and domains in thin films, nano stripes and 3D structures
3D nano-tomography using coherent X-rays
True 3D measurements of micro and nano structures
Metal nano 3D superlattices : synthesis, properties, and applications
Nano-prototyping and 3D bioimaging with dual beam microscopy
SEM-based nano-analytical methods for 3D semiconductor microstructures
Investigation of 3D nano printed on-chip hollow core waveguides
Computational workflow optimization for magnetic fluctuation measurements of 3D nano-tetrapods
3D Druck
NANo
First-order reversal curves (FORCs) of nano-engineered 3D Co-Fe structures
Galvanoformen von nano-Nickel und nano-Invar
Magnetic domain walls and domains in thin films, nano stripes and 3D structures
3D nano-tomography using coherent X-rays
True 3D measurements of micro and nano structures
Metal nano 3D superlattices : synthesis, properties, and applications
Nano-prototyping and 3D bioimaging with dual beam microscopy
SEM-based nano-analytical methods for 3D semiconductor microstructures
Investigation of 3D nano printed on-chip hollow core waveguides
Computational workflow optimization for magnetic fluctuation measurements of 3D nano-tetrapods
3D Druck
NANo
First-order reversal curves (FORCs) of nano-engineered 3D Co-Fe structures
Galvanoformen von nano-Nickel und nano-Invar