Bulk and Surface-Related Degradation in Lifetime Samples Made of Czochralski Silicon Passivated by Plasma-Enhanced Chemical Vapor Deposited Layer Stacks
- Standort
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Deutsche Nationalbibliothek Frankfurt am Main
- Umfang
-
Online-Ressource
- Sprache
-
Englisch
- Erschienen in
-
In: Physica Status Solidi (A) - Applications and Materials Science ; 215 (2018), 24. - 1800741. - ISSN 1862-6319. - eISSN 1862-6300
- Klassifikation
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Ingenieurwissenschaften und Maschinenbau
- Ereignis
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Veröffentlichung
- (wo)
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Konstanz
- (wer)
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KOPS Universität Konstanz
- (wann)
-
2018
- Urheber
- URN
-
urn:nbn:de:bsz:352-2-1pu5i0t2e3buy1
- Rechteinformation
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Letzte Aktualisierung
-
25.03.2025, 13:49 MEZ
Datenpartner
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Beteiligte
- Sperber, David
- Schwarz, Anton
- Herguth, Axel
- Hahn, Giso
- KOPS Universität Konstanz
Entstanden
- 2018
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