Feasible Resolution of Angular Displacement Measurement by an Optical Angle Sensor Based on Laser Autocollimation
- Location
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Deutsche Nationalbibliothek Frankfurt am Main
- Extent
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Online-Ressource, 1 online resource.
- Language
-
Englisch
- Bibliographic citation
-
Feasible Resolution of Angular Displacement Measurement by an Optical Angle Sensor Based on Laser Autocollimation ; volume:6 ; number:1 ; day:28 ; month:8 ; year:2023 ; pages:1-14 ; date:12.2023
Nanomanufacturing and metrology ; 6, Heft 1 (28.8.2023), 1-14, 12.2023
- Creator
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Lim, Hyunsung
Shimizu, Yuki
- Contributor
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SpringerLink (Online service)
- DOI
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10.1007/s41871-023-00211-8
- URN
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urn:nbn:de:101:1-2023110711353341446425
- Rights
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Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Last update
-
14.08.2025, 10:58 AM CEST
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Associated
- Lim, Hyunsung
- Shimizu, Yuki
- SpringerLink (Online service)
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