Hochschulschrift
Investigation of industrially-suited processes for deposition of oxide thin films by high power impulse magnetron sputtering
- Location
-
Deutsche Nationalbibliothek Frankfurt am Main
- ISBN
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9783839612873
383961287X
- Dimensions
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21 cm
- Extent
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XV, 196 Seiten
- Language
-
Englisch
- Notes
-
Illustrationen
Technische Universität Carolo-Wilhelmina zu Braunschweig, Dissertation, 2017
- Bibliographic citation
-
Berichte aus Forschung und Entwicklung / Fraunhofer-Institut für Schicht- und Oberflächentechnik ; Nr. 043
- Keyword
-
Hochleistungsimpulsmagnetronsputtern
Dünne Schicht
Oxidschicht
Isolierschicht
Aluminiumoxide
Transparent-leitendes Oxid
Indiumoxide
Zinnoxide
Zinkoxid
Prozessführung
- Event
-
Veröffentlichung
- (where)
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Stuttgart
- (who)
-
Fraunhofer Verlag
- (when)
-
[2018]
- Creator
- Contributor
- Table of contents
- Rights
-
Bei diesem Objekt liegt nur das Inhaltsverzeichnis digital vor. Der Zugriff darauf ist unbeschränkt möglich.
- Last update
-
11.06.2025, 1:41 PM CEST
Data provider
This object is provided by:
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Object type
- Hochschulschrift
Associated
- Campos Carreri, Felipe de
- Fraunhofer IRB-Verlag
- Fraunhofer IST
- Fraunhofer Verlag
Time of origin
- [2018]
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An Investigation of Target Poisoning during Reactive Magnetron Sputtering
An investigation of target poisoning during reactive magnetron sputtering
Fabrication and study of ito thin films prepared by magnetron sputtering
Fabrication and study of ITO thin films prepared by magnetron sputtering
Realization of solid state thin film lithium batteries via magnetron sputtering
Deposition of nanostructured Cu-Ti based films by advanced magnetron sputtering methods
Zinc Oxide Thin Film Transistors by Radio Frequency Magnetron Sputtering
Magnetron sputter deposition of nanostructured AlN thin films
Exploring the potential of serial magnetron co-sputtering
Strain Effects by Surface Oxidation of Cu3N Thin Films Deposited by DC Magnetron Sputtering
Deposition of 3YSZ-TiC PVD coatings with high-power impulse magnetron sputtering (HiPIMS)
Surface Stoichiometry and Depth Profile of Tix-CuyNz Thin Films Deposited by Magnetron Sputtering
An Investigation of Target Poisoning during Reactive Magnetron Sputtering
An investigation of target poisoning during reactive magnetron sputtering
Fabrication and study of ito thin films prepared by magnetron sputtering
Fabrication and study of ITO thin films prepared by magnetron sputtering
Realization of solid state thin film lithium batteries via magnetron sputtering
Deposition of nanostructured Cu-Ti based films by advanced magnetron sputtering methods
Zinc Oxide Thin Film Transistors by Radio Frequency Magnetron Sputtering
Magnetron sputter deposition of nanostructured AlN thin films
Exploring the potential of serial magnetron co-sputtering
Strain Effects by Surface Oxidation of Cu3N Thin Films Deposited by DC Magnetron Sputtering
Deposition of 3YSZ-TiC PVD coatings with high-power impulse magnetron sputtering (HiPIMS)
Surface Stoichiometry and Depth Profile of Tix-CuyNz Thin Films Deposited by Magnetron Sputtering
An Investigation of Target Poisoning during Reactive Magnetron Sputtering