Exploring nanowire regrowth for the integration of bottom-up grown silicon nanowires into AFM scanning probes
- Standort
-
Deutsche Nationalbibliothek Frankfurt am Main
- Umfang
-
Online-Ressource
- Sprache
-
Englisch
- Erschienen in
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In: Journal of micromechanics and microengineering(31, 2021), H. 5
- Ereignis
-
Veröffentlichung
- (wo)
-
Ilmenau
- (wer)
-
TU Ilmenau
- (wann)
-
2021
- Urheber
- DOI
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10.1088/1361-6439/abf332
- URN
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urn:nbn:de:101:1-2022021506400316723301
- Rechteinformation
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Letzte Aktualisierung
-
25.03.2025, 13:50 MEZ
Datenpartner
Dieses Objekt wird bereitgestellt von:
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Beteiligte
- Behroudj, Arezo
- Salimitari, Parastoo
- Nilsen, Madeleine
- Strehle, Steffen
- TU Ilmenau
Entstanden
- 2021
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