Sensitivity improvement to active piezoresistive AFM probes using focused ion beam processing
- Location
-
Deutsche Nationalbibliothek Frankfurt am Main
- Extent
-
Online-Ressource
- Language
-
Englisch
- Bibliographic citation
-
In: Sensors(19, 2019), H. 20
- Event
-
Veröffentlichung
- (where)
-
Ilmenau
- (who)
-
TU Ilmenau
- (when)
-
2019
- Creator
- DOI
-
10.3390/s19204429
- URN
-
urn:nbn:de:101:1-2020052503111947930643
- Rights
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Last update
-
25.03.2025, 1:54 PM CET
Data provider
This object is provided by:
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Associated
- Kunicki, Piotr
- Angelov, Tihomir
- Ivanov, Tzvetan
- Gotszalk, Teodor
- Rangelow, Ivo W.
- TU Ilmenau
Time of origin
- 2019
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