Sensitivity improvement to active piezoresistive AFM probes using focused ion beam processing
- Standort
-
Deutsche Nationalbibliothek Frankfurt am Main
- Umfang
-
Online-Ressource
- Sprache
-
Englisch
- Erschienen in
-
In: Sensors(19, 2019), H. 20
- Ereignis
-
Veröffentlichung
- (wo)
-
Ilmenau
- (wer)
-
TU Ilmenau
- (wann)
-
2019
- Urheber
- DOI
-
10.3390/s19204429
- URN
-
urn:nbn:de:101:1-2020052503111947930643
- Rechteinformation
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Letzte Aktualisierung
-
25.03.2025, 13:54 MEZ
Datenpartner
Dieses Objekt wird bereitgestellt von:
Deutsche Nationalbibliothek. Bei Fragen zum Objekt wenden Sie sich bitte an den Datenpartner.
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Beteiligte
- Kunicki, Piotr
- Angelov, Tihomir
- Ivanov, Tzvetan
- Gotszalk, Teodor
- Rangelow, Ivo W.
- TU Ilmenau
Entstanden
- 2019
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