- Location
-
Deutsche Nationalbibliothek Frankfurt am Main
- Extent
-
Online-Ressource
- Language
-
Englisch
- Notes
-
In: Proc. SPIE 6792, 24th European Mask and Lithography Conference, 679203 (2 May 2008); https://doi.org/10.1117/12.798512
- Event
-
Veröffentlichung
- (where)
-
Wildau
- (who)
-
Technische Hochschule Wildau
- (when)
-
2008
- Creator
-
Geisler, Sebastian
Bauer, Joachim
Haak, Ulrich
Stolarek, David
Schulz, K.
Wolf, H.
Meier, W.
Trojahn, M.
Matthus, E.
Beyer, Harald
Old, G.
Marschmeyer, Steffen
Kuck, B.
- URN
-
urn:nbn:de:kobv:526-opus4-15176
- Rights
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Last update
-
25.03.2025, 1:52 PM CET
Data provider
This object is provided by:
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Associated
- Geisler, Sebastian
- Bauer, Joachim
- Haak, Ulrich
- Stolarek, David
- Schulz, K.
- Wolf, H.
- Meier, W.
- Trojahn, M.
- Matthus, E.
- Beyer, Harald
- Old, G.
- Marschmeyer, Steffen
- Kuck, B.
- Technische Hochschule Wildau
Time of origin
- 2008
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