Matrix laser cleaning: a new technique for the removal of nanometer sized particles from semiconductors
- Standort
-
Deutsche Nationalbibliothek Frankfurt am Main
- Umfang
-
Online-Ressource
- Sprache
-
Englisch
- Erschienen in
-
In: Applied Physics ; 88 (2007), 2. - S. 277-230
- Klassifikation
-
Physik
- Ereignis
-
Veröffentlichung
- (wo)
-
Konstanz
- (wer)
-
Bibliothek der Universität Konstanz
- (wann)
-
2007
- Urheber
-
Graf, Johannes
Luk'jancuk, Boris S.
Mosbacher, Mario
Hong, Ming Hui
Chong, Chong T.
Boneberg, Johannes
Leiderer, Paul
- URN
-
urn:nbn:de:bsz:352-opus-31063
- Rechteinformation
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Letzte Aktualisierung
-
14.08.2025, 11:00 MESZ
Datenpartner
Dieses Objekt wird bereitgestellt von:
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Beteiligte
- Graf, Johannes
- Luk'jancuk, Boris S.
- Mosbacher, Mario
- Hong, Ming Hui
- Chong, Chong T.
- Boneberg, Johannes
- Leiderer, Paul
- Bibliothek der Universität Konstanz
Entstanden
- 2007
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Infrared steam laser cleaning
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