Formation mechanism of SiGe nanorod arrays by combining nanosphere lithography and Au-assisted chemical etching

Location
Deutsche Nationalbibliothek Frankfurt am Main
ISSN
1556-276X
Extent
Online-Ressource
Language
Englisch
Notes
online resource.

Bibliographic citation
Formation mechanism of SiGe nanorod arrays by combining nanosphere lithography and Au-assisted chemical etching ; volume:7 ; number:1 ; day:18 ; month:2 ; year:2012 ; pages:1-6 ; date:12.2012
Nanoscale research letters ; 7, Heft 1 (18.2.2012), 1-6, 12.2012

Creator
Lai, Chih-Chung
Lee, Yun-Ju
Yeh, Ping-Hung
Lee, Sheng-Wei
Contributor
SpringerLink (Online service)

DOI
10.1186/1556-276X-7-140
URN
urn:nbn:de:101:1-2021082818514697708923
Rights
Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
Last update
15.08.2025, 7:26 AM CEST

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Associated

  • Lai, Chih-Chung
  • Lee, Yun-Ju
  • Yeh, Ping-Hung
  • Lee, Sheng-Wei
  • SpringerLink (Online service)

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