Large-scale Patterning of Hydrophobic Silicon Nanostructure Arrays Fabricated by Dual Lithography and Deep Reactive Ion Etching
- Standort
-
Deutsche Nationalbibliothek Frankfurt am Main
- ISSN
-
2150-5551
- Umfang
-
Online-Ressource
- Sprache
-
Englisch
- Anmerkungen
-
online resource.
- Erschienen in
-
Large-scale Patterning of Hydrophobic Silicon Nanostructure Arrays Fabricated by Dual Lithography and Deep Reactive Ion Etching ; volume:5 ; number:1 ; day:30 ; month:1 ; year:2013 ; pages:7-12 ; date:3.2013
Nano-Micro letters ; 5, Heft 1 (30.1.2013), 7-12, 3.2013
- Urheber
-
Ma, Zhibo
- Beteiligte Personen und Organisationen
-
Jiang, Chengyu
Yuan, Weizheng
He, Yang
SpringerLink (Online service)
- DOI
-
10.1007/BF03353725
- URN
-
urn:nbn:de:1111-2016052052563
- Rechteinformation
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Letzte Aktualisierung
- 14.08.2025, 10:45 MESZ
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Beteiligte
- Ma, Zhibo
- Jiang, Chengyu
- Yuan, Weizheng
- He, Yang
- SpringerLink (Online service)
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