Aufsatzsammlung
Predictive simulation of semiconductor processing : status and challenges
Predictive simulation of semiconductor processingenables researchers and developersto extend the scaling range of semiconductor devices beyond the parameter range of empirical research. It requires a thorough understanding of the basic mechanisms employed in device fabrication, such as diffusion, ion implantation, epitaxy, defect formation and annealing, and contamination. This book presents an in-depth discussion of our current understanding of key processes and identifies areas that require further work in order to achieve the goal of a comprehensive, predictive process simulation tool. TOC:Transistors and Atoms.- Atomistic Simulations of Processes at Surfaces.- Atomistic Simulations in Materials Processing.- Atomistic Simulation of Decanano MOSFETs.- Modeling and Simulation of Heterojunction Bipolar Transistors.- Gate Oxide Reliability: Physical and Computational Models.- High-K Dielectrics: The Example of Pr2O3.- Atomistic Simulation of Si3N4 CVD from Dichlorosilane and NH3.- Interconnects and Propagation of High Frequency Signals.- Modeling of Electromigration in Interconnects.- Predictive Modeling of Transition Metal Gathering: Applications and Materials Science Challenges.
- Location
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Deutsche Nationalbibliothek Frankfurt am Main
- ISBN
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9783540204817
3540204814
- Dimensions
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24 cm
- Extent
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XVII, 490 S.
- Language
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Englisch
- Notes
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Ill., graph. Darst.
Literaturangaben
- Bibliographic citation
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Springer series in materials science ; 72
- Classification
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Ingenieurwissenschaften und Maschinenbau
Physik
- Keyword
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Transistor
Atomare Bewegung
Computersimulation
Halbleitertechnologie
Prozesssimulation
- Event
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Veröffentlichung
- (where)
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Berlin, Heidelberg, New York, Hong Kong, London, Milan, Paris, Tokyo
- (who)
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Springer
- (when)
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2004
- Contributor
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Dabrowski, Jarek
- Table of contents
- Rights
-
Bei diesem Objekt liegt nur das Inhaltsverzeichnis digital vor. Der Zugriff darauf ist unbeschränkt möglich.
- Last update
-
11.03.2025, 12:06 PM CET
Data provider
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Object type
- Aufsatzsammlung
Associated
- Dabrowski, Jarek
- Springer
Time of origin
- 2004
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Atomic layer processing : semiconductor dry etching technology
Action-oriented predictive processing and social cognition
Semiconductor-based electron lattices for quantum information processing
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Sleep and dreaming in the predictive processing framework
Intention-based predictive information modulates auditory deviance processing