Advances in high-performance MEMS pressure sensors: design, fabrication, and packaging
- Standort
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Deutsche Nationalbibliothek Frankfurt am Main
- Umfang
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1 Online-Ressource.
- Sprache
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Englisch
- Erschienen in
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Advances in high-performance MEMS pressure sensors: design, fabrication, and packaging ; volume:9 ; number:1 ; day:19 ; month:12 ; year:2023 ; pages:1-34 ; date:12.2023
Microsystems & nanoengineering ; 9, Heft 1 (19.12.2023), 1-34, 12.2023
- Urheber
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Han, Xiangguang
Huang, Mimi
Wu, Zutang
Gao, Yi
Xia, Yong
Yang, Ping
Fan, Shu
Lu, Xuhao
Yang, Xiaokai
Liang, Lin
Su, Wenbi
Wang, Lu
Cui, Zeyu
Zhao, Yihe
Li, Zhikang
Zhao, Libo
Jiang, Zhuangde
- Beteiligte Personen und Organisationen
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SpringerLink (Online service)
- DOI
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10.1038/s41378-023-00620-1
- URN
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urn:nbn:de:101:1-2024030321082573867367
- Rechteinformation
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Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Letzte Aktualisierung
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14.08.2025, 10:46 MESZ
Datenpartner
Dieses Objekt wird bereitgestellt von:
Deutsche Nationalbibliothek. Bei Fragen zum Objekt wenden Sie sich bitte an den Datenpartner.
Deutsche Nationalbibliothek. Bei Fragen zum Objekt wenden Sie sich bitte an den Datenpartner.
Beteiligte
- Han, Xiangguang
- Huang, Mimi
- Wu, Zutang
- Gao, Yi
- Xia, Yong
- Yang, Ping
- Fan, Shu
- Lu, Xuhao
- Yang, Xiaokai
- Liang, Lin
- Su, Wenbi
- Wang, Lu
- Cui, Zeyu
- Zhao, Yihe
- Li, Zhikang
- Zhao, Libo
- Jiang, Zhuangde
- SpringerLink (Online service)
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