Advances in high-performance MEMS pressure sensors: design, fabrication, and packaging
- Location
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Deutsche Nationalbibliothek Frankfurt am Main
- Extent
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1 Online-Ressource.
- Language
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Englisch
- Bibliographic citation
-
Advances in high-performance MEMS pressure sensors: design, fabrication, and packaging ; volume:9 ; number:1 ; day:19 ; month:12 ; year:2023 ; pages:1-34 ; date:12.2023
Microsystems & nanoengineering ; 9, Heft 1 (19.12.2023), 1-34, 12.2023
- Creator
-
Han, Xiangguang
Huang, Mimi
Wu, Zutang
Gao, Yi
Xia, Yong
Yang, Ping
Fan, Shu
Lu, Xuhao
Yang, Xiaokai
Liang, Lin
Su, Wenbi
Wang, Lu
Cui, Zeyu
Zhao, Yihe
Li, Zhikang
Zhao, Libo
Jiang, Zhuangde
- Contributor
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SpringerLink (Online service)
- DOI
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10.1038/s41378-023-00620-1
- URN
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urn:nbn:de:101:1-2024030321082573867367
- Rights
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Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Last update
-
14.08.2025, 10:46 AM CEST
Data provider
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Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Associated
- Han, Xiangguang
- Huang, Mimi
- Wu, Zutang
- Gao, Yi
- Xia, Yong
- Yang, Ping
- Fan, Shu
- Lu, Xuhao
- Yang, Xiaokai
- Liang, Lin
- Su, Wenbi
- Wang, Lu
- Cui, Zeyu
- Zhao, Yihe
- Li, Zhikang
- Zhao, Libo
- Jiang, Zhuangde
- SpringerLink (Online service)
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