Process Development for Batch Production of Micro-Milling Tools Made of Silicon Carbide by Means of the Dry Etching Process
- Standort
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Deutsche Nationalbibliothek Frankfurt am Main
- Umfang
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Online-Ressource
- Sprache
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Englisch
- Erschienen in
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In: Wittek, C.-G.R.; Steinhoff, L.; Raumel, S.; Reißfelder, M.; Dencker, F. et al.: Process Development for Batch Production of Micro-Milling Tools Made of Silicon Carbide by Means of the Dry Etching Process. In: Micromachines 14 (2023), Nr. 3, 580. DOI: https://doi.org/10.3390/mi14030580
- Ereignis
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Veröffentlichung
- (wo)
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Hannover
- (wer)
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Gottfried Wilhelm Leibniz Universität Hannover
- (wann)
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2023
- Ereignis
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Veröffentlichung
- (wo)
-
Hannover
- (wer)
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Technische Informationsbibliothek (TIB)
- (wann)
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2023
- Urheber
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Wittek, Christian-G. R.
Steinhoff, Lukas
Raumel, Selina
Reißfelder, Michael
Dencker, Folke
Wurz, Marc C.
- DOI
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10.15488/14862
- URN
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urn:nbn:de:101:1-2023101202141782253781
- Rechteinformation
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Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Letzte Aktualisierung
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25.03.2025, 13:44 MEZ
Datenpartner
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Beteiligte
- Wittek, Christian-G. R.
- Steinhoff, Lukas
- Raumel, Selina
- Reißfelder, Michael
- Dencker, Folke
- Wurz, Marc C.
- Gottfried Wilhelm Leibniz Universität Hannover
- Technische Informationsbibliothek (TIB)
Entstanden
- 2023
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