High speed silicon wet anisotropic etching for applications in bulk micromachining: a review

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Location: Deutsche Nationalbibliothek Frankfurt am Main

ISSN: 2213-9621

Extent: Online-Ressource

Language: Englisch

Notes: online resource.

Bibliographic citation: High speed silicon wet anisotropic etching for applications in bulk micromachining: a review ; volume:9 ; number:1 ; day:22 ; month:2 ; year:2021 ; pages:1-59 ; date:12.2021
Micro and Nano Systems Letters ; 9, Heft 1 (22.2.2021), 1-59, 12.2021

Creator: Pal, Prem
Swarnalatha, Veerla
Rao, Avvaru Venkata Narasimha
Pandey, Ashok Kumar
Tanaka, Hiroshi
Sato, Kazuo

Contributor: SpringerLink (Online service)

DOI: 10.1186/s40486-021-00129-0

URN: urn:nbn:de:101:1-2021041008151622643313

Rights: Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.

Last update: 14.08.2025, 10:55 AM CEST

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Pal, Prem
Swarnalatha, Veerla
Rao, Avvaru Venkata Narasimha
Pandey, Ashok Kumar
Tanaka, Hiroshi
Sato, Kazuo
SpringerLink (Online service)

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High speed silicon wet anisotropic etching for applications in bulk micromachining: a review

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Other Objects (12)

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